SR-EUV/200/150 Fully Automatic Reticle Pod Cleaning System

OVERVIEWThe SR-EUV/200/150 is Hugle’s fully automatic cleaning system for EUV Reticle PODs, RSP-200 and RSP-150. Cleaning these pods is one of the most demanding applications for container cleaning equipment in the Semiconductor Industry. Hugle has met the challenge with innovative technology and unmatched system reliability. The EUV pod is automatically fed into the system, outer…

UPC-12500 SORA Fully Automatic FOUP Cleaning System

OVERVIEW300mm wafers have become the industry standard for semiconductor development and manufacturing. Exceptional FOUP cleaning is required for advanced products especially with the introduction of EUV lithography. Hugle Electronics has built on the solid performance of the UPC-12100 by introducing the UPC-12500. The 12500 is a fully automatic FOUP Cleaning System with excellent performance, throughput…