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	Semiconductor Equipment Corporation's SORA UPC-12500 Fully Automatic FOUP Cleaning System has the highest throughput among single FOUP processing systems.

High Throughput – 3 advanced load ports, buffers, and transfer robot (20% increase to conventional system) 7 FOUP storage capacity Multi-joint robot operates inside for higher safety Lower Cross Contamination Risk: compact front-door and fully automated FOUP opening/closing Small Footprint: Built-in tank unit with UPS Super High Purity Cleaning – 2-fluid high pressure jet cleaners Cleanliness of CLASS 10 or higher Hot air knife drying and FOUP door spinning facilitate the drying process Compliant to various standards – SEMI, GEM300, CE, UL

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