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	Hugle Electronics Inc. has developed FOSB/FOUP cleaning system “HNM-300” equipped with cleaning and drying “2-in-1” function.

High Throughput (Our ratio: a twofold increase) Small Footprint(excluding separate placement subunit) Super High Purity Cleaning by nozzle cleaning Complete Drying by reliable and successful “hot air spraying” and “high speed spin” Dust suppression, ESD elimination system equipping with fine filter and Ionizer Securing working space for disassemble & assemble container (no need to arrange clean booth separately) Automatic purging function to prevent growth of bacteria Easy operation by touch panel Ensure High safety with completion of various interlocking system

	Dimension: 2300(W)x1400(D)x2200(H)mm Weight: 800kg Power: 3 phase AC200+-10V Exhaust: 3000 litter/min Drain: 10 litter/min D.I .Water: Supply (10 litter/min as minimum) Pressure (0.3Mpa) CDA (Clean Dry Air) Supply (2500 litter/min) Pressure (0.75Mpa) Automatic FOUP opener and filter for DI water are available as optional item

Contact Sales for more product information.